Section methods of X-Ray diffraction topography

X-ray topography is a group of methods for obtaining diffraction images structural defects in crystals. Among them, section techniques are distinguished by their abilities acquiring quantitative information about based on the analysis images. For this purpose, special applications dynamic theory being developed. The interference wave fields excited crystal an beam basis methods. Their sensitivity to weak lattice distortions much higher than that other This review describes physical foundations and implementation techniques, as well results computer simulating field crystal. We present some examples solving materials science microelectronics problems briefly describe using synchrotron radiation. Keywords: topography, single crystals, silicon, diamond, indium antimonide.